Research topics

Active areas of semiconductor research, each linked to the concepts, processes, tools, and companies behind it. Browse by technology, process, device, material, application, or company. Looking for institutions? See universities and labs.

9 topics

• EUV lithography

  Extreme-ultraviolet patterning and its extension to High-NA.

  EUVHigh-NA EUVComputational lithography

• Gate-all-around transistors

  Nanosheet transistors succeeding the FinFET.

  Gate-all-around (GAA)NanosheetCFET

• Advanced packaging & chiplets

  Heterogeneous integration of multiple dies.

  Chiplets2.5D3D stacking

• High-bandwidth memory (HBM)

  Stacked DRAM for bandwidth-hungry accelerators.

  HBMTSVDie stacking

• Wide-bandgap semiconductors

  Silicon carbide and gallium nitride for power and RF.

  Silicon carbide (SiC)Gallium nitride (GaN)Power devices

• Interconnect scaling

  Keeping on-chip wiring fast as pitches shrink.

  Copper damasceneLow-κ dielectricsAlternative metals (Co, Ru)

• Yield & defect learning

  Finding and fixing defects to ramp yield.

  Defect inspectionMetrologyStatistical process control

• AI-driven design automation

  Machine learning inside the chip-design flow.

  AI/ML in EDACloud EDADesign-space exploration

• 3D integration

  Stacking devices vertically with dense bonding.

  3D ICTSVHybrid bonding