Yield & defect learning
Finding and fixing defects to ramp yield.
Yield is the economic heart of a fab. Research combines metrology, defect inspection, and statistical/AI methods to find defects early and shorten the yield-ramp of new process nodes.
Technologies
Defect inspectionMetrologyStatistical process controlAI defect classification
Applications
Fab operations
Active research directions
- Faster yield ramp at new nodes
- AI/ML defect root-cause
- Metrology for EUV-era features