LithographyMVP
Lithography resolution
Estimate the smallest printable feature with the Rayleigh criterion R = k₁·λ/NA.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter a wavelength, numerical aperture, and k₁ factor.
Formula
R = k₁ · λ / NA
Educational, theoretical estimate.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| R | Resolution (min. half-pitch) | m (shown as nm) |
| k₁ | Process factor | dimensionless |
| λ | Exposure wavelength | m |
| NA | Numerical aperture | dimensionless |
Assumptions & validity
This tool assumes:
- Rayleigh criterion R = k₁·λ/NA — first-order optics only.
- k₁ bundles illumination, resist, and mask effects; single-exposure floor ≈ 0.25.
- Does not model process window, resist chemistry, mask correction, or metrology.
Worked example
λ = 193 nm, NA = 1.35, k₁ = 0.28.
R = 0.28 × 193 nm / 1.35 ≈ 40 nm