LithographyMVP
Pitch / half-pitch
Convert a feature pitch into half-pitch and the line/space interpretation.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter a pitch to get its half-pitch.
Formula
half-pitch = pitch / 2
Equal line/space: line = space = half-pitch.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| pitch | Centre-to-centre spacing | m |
| half-pitch | Half of the pitch | m |
Assumptions & validity
This tool assumes:
- Line width = space is assumed for the equal line/space interpretation.
- Asymmetric patterns (unequal line and space) are not represented by half-pitch alone.
Worked example
pitch = 80 nm.
half-pitch = 80 / 2 = 40 nm (40 nm line + 40 nm space)