Etching & depositionMVP
Aspect ratio
Feature aspect ratio (depth ÷ width) and what it implies for etching, deposition, and packaging.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter a feature depth and width (same or different length units).
Formula
AR = depth / width
Dimensionless; units cancel.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| AR | Aspect ratio | dimensionless |
| depth | Feature depth | m |
| width | Feature width | m |
Assumptions & validity
This tool assumes:
- Aspect ratio = depth ÷ width; both lengths, so the units cancel.
- A single feature; does not account for profile shape or sidewall angle.
Worked example
depth = 200 nm, width = 50 nm.
AR = 200 nm / 50 nm = 4 (i.e. 4:1)