LithographyMVP
Exposure dose
Educational dose from exposure energy and exposed area: dose = energy / area.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter the exposure energy and the exposed area.
Formula
dose = energy / area
Energy per unit area (commonly mJ/cm²).
Variables
| Symbol | Variable | Unit |
|---|---|---|
| dose | Exposure dose | J/m² (shown as mJ/cm²) |
| energy | Exposure energy | J |
| area | Exposed area | m² |
Assumptions & validity
This tool assumes:
- Dose = energy ÷ area, assuming energy is spread uniformly over the area.
- Educational definition only — not a model of resist response or process control.
Worked example
energy = 1 mJ, area = 1 cm² (100 mm²).
dose = 1 mJ / 1 cm² = 1 mJ/cm² (= 10 J/m²)