Etching & depositionMVP
Deposition rate
Average deposition rate from the deposited thickness and the process time.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter the deposited thickness and the process time.
Formula
rate = thickness / time
Average rate over the run.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| rate | Deposition rate | m/s (shown as nm/min) |
| thickness | Deposited thickness | m |
| time | Process time | s |
Assumptions & validity
This tool assumes:
- Average rate = thickness ÷ time.
- Assumes a constant rate; nucleation and process drift are not modelled.
Worked example
thickness = 100 nm, time = 2 min.
rate = 100 nm / 2 min = 50 nm/min