ManufacturingMVP
Sheet resistance
Sheet resistance of a thin film from its resistivity and thickness, and the resistance of a patterned stripe.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter the film resistivity and thickness (and optionally a length-to-width ratio).
Formula
R_s = ρ / t , R = R_s · (L/W)
Ω/□ for the film; Ω for a patterned stripe.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| R_s | Sheet resistance | Ω/□ (ohms per square) |
| ρ | Resistivity | Ω·m |
| t | Film thickness | m |
| R | Stripe resistance | Ω |
| L/W | Number of squares | dimensionless |
Assumptions & validity
This tool assumes:
- Uniform film of constant resistivity and thickness.
- Current flows laterally; thickness is small compared with lateral dimensions.
- Ω/□ is dimensionally ohms — the 'per square' label marks it as a sheet quantity.
Worked example
ρ = 1×10⁻⁵ Ω·m, t = 100 nm, 10 squares.
R_s = 1×10⁻⁵ / 1×10⁻⁷ = 100 Ω/□; R = 100 × 10 = 1000 Ω