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Device physicsMVP

Interconnect resistance

Resistance of a metal wire from its resistivity and geometry: R = ρL/(W·t).

Inputs

e.g. ~2×10⁻⁸ Ω·m for copper (thin-film values run higher).

Result

Enter values and calculate to see the result.

Interpretation

Enter the wire resistivity, length, width, and thickness.

Formula

Interconnect resistance
R = ρ · L / (W · t) = Rs · (L/W)

Rs = ρ/t is the sheet resistance.

Variables

SymbolVariableUnit
RWire resistanceΩ
ρResistivityΩ·m
L, W, tLength, width, thicknessm
RsSheet resistanceΩ/□

Assumptions & validity

Worked example

ρ = 2×10⁻⁸ Ω·m, L = 100 µm, W = 1 µm, t = 100 nm.

Rs = 0.2 Ω/□; squares = 100; R = 20 Ω