Etching & depositionMVP
Etch time estimator
Estimate the time to etch a given thickness at a known etch rate.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter the material thickness and the etch rate.
Formula
time = thickness / rate
Constant-rate estimate; real etches use endpoint detection.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| time | Etch time | s |
| thickness | Material thickness | m |
| rate | Etch rate | m/s |
Assumptions & validity
This tool assumes:
- Constant etch rate.
- No endpoint detection or process margin included.
Worked example
thickness = 150 nm, rate = 300 nm/min.
time = 150 nm / 300 nm/min = 0.5 min = 30 s