Etching & depositionMVP
Etch rate
Average etch rate from how much material was removed over the process time.
Inputs
Result
Enter values and calculate to see the result.
Interpretation
Enter the initial and remaining thickness and the process time.
Formula
rate = (initial − remaining) / time
Average rate over the etch.
Variables
| Symbol | Variable | Unit |
|---|---|---|
| rate | Etch rate | m/s (shown as nm/min) |
| initial | Initial thickness | m |
| remaining | Remaining thickness | m |
| time | Process time | s |
Assumptions & validity
This tool assumes:
- Average rate over the etch.
- Constant rate assumed; loading/ARDE/endpoint effects not modelled.
Worked example
initial = 200 nm, remaining = 50 nm, time = 30 s.
rate = (200 − 50) nm / 30 s = 5 nm/s = 300 nm/min